FEI XL-30

The FEI XL-30 ESEM (Environmental Scanning Electron Microscope) features a conventional hairpin tungsten source allowing secondary electron image resolutions to 6nm. A backscatter electron (BSE) and gaseous secondary electron detector (GSE) are also available. The large specimen chamber on the XL-30 is ideal for analyzing larger awkward samples. An integrated energy dispersive X-ray micro-analysis (EDS) system provides complimentary compositional analysis. The XL-30 is also equipped with a unique Gatan X-ray Ultramicroscope (Xum) for non-destructive imaging of internal structures.