Focused Ion Beam (FIB): Instrumentation and Applications
June 5-9, 2017
This course is designed for those using or are interested in using the FIB or FIB/SEM platforms in academic, governmental, or industrial laboratories in either the physical or biological sciences. Basic ion-solid interaction theory will be introduced and used in describing methods of specimen preparation for SEM, TEM, AFM, Auger, SIMS, and atom probe. Other topics include 2D/3D FIB/SEM analytical characterization, milling/deposition techniques for nanotechnology, and advances in instrumentation.
Lucille Giannuzzi, Joe Michael, Keana Scott
Course Outline (PDF)
Each registrant teceives the textbook, Introduction to Focused Ion Beam: Instrumentation, Theory, Techniques and Practice (2005) (eds. L. A. Giannuzzi and F. A. Stevie) Springer Publishers, as well as detailed laboratory notes which provide experimental results and worked problems. The book and the notes are authored by the lecturers of the course. In addition, everyone receives additional notes for specific lectures, a list of vendors and equipment suppliers, and a link to a website containing exclusive imaging and analysis software.