Microelectronics Technology

Short-Course

The Microelectronics Technology Short-Course is a hands-on laboratory experience covering the manufacturing of microelectronic circuits and devices. It is four days of intensive study that covers all parts of the basic manufacturing process. Topics of study include silicon oxidation, diffusion, ion implantation, photolithography, plasma processes, and metalization.

Day One:

The day begins with a review of basic electronics including the operation of semiconductor devices such as capacitors, diodes, transistors and simple circuits.

Most of the day is spent covering theory behind the technology. Oxidation, diffusion, photolithography, CVD, wet and dry etching, metalization and clean room operation are discussed in detail.

Day Two:

Students make use of a computer simulation on the second day. The simulation gives students an opportunity to manufacture a simulated integrated circuit. The simulation is hands on with students directly interacting with the simulated manufacturing process. They carry out oxidations, diffusions, photolithography, etching and metalization. Students receive immediate feedback from the computer about the processing and how well it is progressing.

Day Three and Four:

During the last two days of the course, students move into the microelectronics laboratory where they receive hands on experience in a working facility. Students will operate the systems they studied during the first two days of the class.

The course is introductory in nature. Engineers new to the field or people from related fields should attend. A background in microelectronics is helpful but not required. Training in general science is helpful.

Floyd Miller, Ed.D. has over 20 years experience in the electronics industry. For the past 18 years he has served as the manager of Lehigh University's microelectronics facility. In addition to laboratory management, Dr. Miller has served as an instructor for both credit and non-credit courses in the field of microelectronics.

Dr. Floyd Miller

Sherman Fairchild Center for Solid State Studies

16A Memorial Drive East

Bethlehem, PA 18015

Phone: 610-758-3964

e-mail: fcm1@lehigh.edu