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Vacuum Generators HB 603
This dedicated UHV-STEM operates up to 300kV. It is
equipped with DigiPEELS and two EDS systems: one with a standard
Si(Li) detector and one with an intrinsic Ge detector. The detectors
are configured with an optimum geometry and large solid angles of
collection. This makes this instrument the world leader for high-resolution
XEDS analysis. This instrument is fitted with a NION aberration
corrector.

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